https://publications-cnrc.canada.ca/fra/voir/objet/?id=98c5f1ee-742d-4bdc-9274-bb6dbc13c901
Rechercher Diao, Z; Rechercher Losby, J.E; Rechercher Burgess, J.A.J; Rechercher Sauer, V.T.K; Rechercher Hiebert, W.K; Rechercher Freeman, M.R
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 2013, Volume : 31, Numéro : 5
The authors report a highly flexible process for nanostructure lithography to incorporate specific functions in micro- and nanomechanical devices. The unique...
Article de périodique (revue)