https://publications-cnrc.canada.ca/fra/voir/objet/?id=25ffa6b7-3ed4-43e9-bf0f-7f5d96852b05
Laser-induced thin film processing : 8-10 February 1995, SPIE--the International Society for Optical Engineering, 1995
We report on XeCl excimer (308 nm) laser-assisted dry etching ablation (LADEA) of InP in a Cl2/He atmosphere. The InClx layer produced by the chlorination...
Article de périodique (revue)