https://publications-cnrc.canada.ca/fra/voir/objet/?id=dd48115a-b4ac-4f8d-87e0-8f44789f21fd
Journal of Materials Science, Springer, mars 1992, Volume : 27, Numéro : 5
A study of various parameters affecting the crystallization process of amorphous silicon nitride produced by plasma gas-phase reaction was undertaken to...
Article de périodique (revue)