https://publications-cnrc.canada.ca/fra/voir/objet/?id=ff77f6c3-cc07-431c-b22c-d3f459a74d72
Journal of Vacuum Science & Technology A: Vacuum, 30 juin 1996, Volume : 14, Numéro : 4
Anodic oxidation at constant voltage has been used to produce oxide films of thickness 10舑440 Å on Si(100). The electrolyte was 0.1 M HCl. Both annealed and...
Article de périodique (revue)