https://publications-cnrc.canada.ca/fra/voir/objet/?id=ce326f9d-5f08-48ef-94e2-4554edc3c8c9
Rechercher Fekecs, André; Rechercher Chicoine, Martin; Rechercher Ilahi, Bouraoui; Rechercher Springthorpe, Anthony J; Rechercher Schiettekatte, François; Rechercher Morris, Denis; Rechercher Charette, Paul G; Rechercher Arès, Richard
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 30 juillet 2015, Volume : 359
We report on critical ion implantation and rapid thermal annealing (RTA) process temperatures that produce resistive Fe- or Ga-implanted InGaAsP/InP...
Article de périodique (revue)