https://catalogue-scientifique.canada.ca/record=2236245~S6*frc
Rechercher Krishnaswami, Kannan; Rechercher Vangala, Shivashankar R; Rechercher Dauplaise, Helen M; Rechercher Allen, Lisa P; Rechercher Dallas, Gordon; Rechercher Bakken, Daniel; Rechercher Bliss, David F; Rechercher Goodhue, WIlliam D
air force research lab hanscom afb ma sensors directorate, 2007
We report results of a surface modification process for (100) GaSb using gas cluster ion beams(GCIB) that removes chemical mechanical polish (CMP) induced...
Publication gouvernementale