https://publications-cnrc.canada.ca/fra/voir/objet/?id=da34a606-ef33-43bd-a76a-1107c8d9fdc6
Rechercher Ridgway, M. C; Rechercher Elliman, R. G; Rechercher Faith, M. E; Rechercher Kemeny, P. C; Rechercher Davies, M
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1 mars 1995, Volume : 96, Numéro : 1-2
The application of high-energy ion implantation for electrical isolation of InP-based materials and devices is described and damage- and chemically-related...
Article de périodique (revue)