https://publications-cnrc.canada.ca/fra/voir/objet/?id=908f0037-dbfd-43ec-b6af-f63508e3b9b2
Rechercher Davis, J.P; Rechercher Vick, D; Rechercher Li, P; Rechercher Portillo, S.K.N; Rechercher Fraser, A.E; Rechercher Burgess, J.A.J; Rechercher Fortin, D.C; Rechercher Hiebert, W.K; Rechercher Freeman, M.R
Journal of Applied Physics, 2011, Volume : 109, Numéro : 7
Micromechanical resonators are very useful for detection of magnetic torque. We have developed nanoscale torsional resonators fabricated within silicon nitride...
Article de périodique (revue)