https://catalogue-scientifique.canada.ca/record=2064789~S6*frc
Rechercher Fedder, Gary K; Rechercher Gabriel, Kaigham J; Rechercher Maher, Mary A; Rechercher Mukherjee, Tamal
carnegie-mellon univ pittsburgh pa, 2005
The primary goal of this project was to develop the technology for an application-specific integrated microelectromechanical systems (MEMS) process service,...
Publication gouvernementale