https://publications-cnrc.canada.ca/fra/voir/objet/?id=3f10e1d3-4c32-4915-8a3f-2623a29bc07e
Rechercher Hsu, P.-F; Rechercher Chi, Y; Rechercher Lin, T.-W; Rechercher Liu, C.-S; Rechercher Carty, A. J; Rechercher Peng, S.-M
Chemical Vapor Deposition, 2001, Volume : 7, Numéro : 1
High purity copper metal is deposited from highly volatile copper complexes at temperatures near 250 °C. SEM shows a dense microstructure and relatively small...
Article de périodique (revue)