https://publications-cnrc.canada.ca/fra/voir/objet/?id=1f636a00-5c29-49e5-9be9-cf6caf3af504
Applied Physics Letters, 18 novembre 1996, Volume : 69, Numéro : 21
Amorphous Si/SiO2 superlattices with 100�525 periods and a 2�3 nm periodicity were deposited by radio frequency magnetron sputtering onto silicon and quartz...
Article de périodique (revue)