https://publications-cnrc.canada.ca/fra/voir/objet/?id=a8aabab3-a8cd-4911-912e-5304066c9644
Journal of Applied Physics, 1 février 1989, Volume : 65, Numéro : February 3
There is a worldwide effort to produce a soft x-ray source for submicron microlithography to manufacture future generation large scale integrated microchips....
Article de périodique (revue)