https://publications-cnrc.canada.ca/fra/voir/objet/?id=0beeaddc-8e47-4561-a8e5-d82f2d0740fe
Rechercher Chen, J. -H; Rechercher Huang, T. -B; Rechercher Wu, X; Rechercher Landheer, Dolf; Rechercher Lei, T. F; Rechercher Chao, T. -S
Journal of the Electrochemical Society, 2007, Volume : 154, Numéro : 1
In this paper, three approaches to incorporating nitrogen in CoTiO3 high-k dielectric films, ion implantation of N2+, ion implantation of N+, and N2O plasma...
Article de périodique (revue)