https://publications-cnrc.canada.ca/fra/voir/objet/?id=4b112de2-8384-4fda-9c99-b1fc920ebc13
Rechercher Das, S. R; Rechercher Xu, D.-X; Rechercher Nournia, M; Rechercher Lebrun, L; Rechercher Naem, A
1996 MRS Spring Meeting - Symposium K – Advanced Metallization for Future ULSI, 1996
In view of their potential application in ULSI technology, nickel silicide films were formed on undoped and doped Si(100) substrates. Nickel films of varying...
Article de périodique (revue)