https://catalogue-scientifique.canada.ca/record=2100404~S6*frc
Rechercher Zalalutdinov, Maxim; Rechercher Aubin, Keith L; Rechercher Reichenbach, Robert B; Rechercher Zehnder, Alan T; Rechercher Houston, Brian; Rechercher Parpia, Jeevak M; Rechercher Craighead, Harold G
cornell univ ithaca ny, 2003
Dome-shaped radio-frequency micromechanical resonators were fabricated by utilizing the buckling of a prestressed thin polysilicon film. The enhanced rigidity...
Publication gouvernementale