https://publications-cnrc.canada.ca/fra/voir/objet/?id=0de506a4-785e-44fe-82a8-a869c24bfbbc
Rechercher Westwood, J. N; Rechercher Sauer, V. T. K; Rechercher Kwan, J. K; Rechercher Hiebert, W. K; Rechercher Sit, J. C
Journal of Micromechanics and Microengineering, 19 mai 2014, Volume : 24, Numéro : 6
Nanoelectromechanical systems (NEMS) coated with a high surface area thin film are fabricated. Glancing angle deposition (GLAD) is used to uniformly deposit...
Article de périodique (revue)