https://publications-cnrc.canada.ca/fra/voir/objet/?id=5705872c-f6ff-495a-97a1-aae0b8ae2d4b
Rechercher Malac, Marek; Rechercher Egerton, Ray; Rechercher Freeman, Mark; Rechercher Lau, June; Rechercher Zhu, Yimei; Rechercher Wu, Lijun
Journal of Vacuum Science and Technology B, American Vacuum Society, 21 janvier 2005, Volume : 23, Numéro : 1
Negative tone patterns were created by polymer-contamination writing in a transmission electron microscope. Typical line edge roughness of the polymer lines...
Article de périodique (revue)