https://publications-cnrc.canada.ca/fra/voir/objet/?id=a94a8255-b44b-4dce-810d-a9f6dde7b8fd
Rechercher Decker, Jennifer E; Rechercher Miles, John R; Rechercher Madej, Alan A; Rechercher Siemsen, Ralph F; Rechercher Siemsen, Klaus J; Rechercher de Bonth, Sebastian; Rechercher Bustraan, Krijn; Rechercher Temple, Sara; Rechercher Pekelsky, James R
Applied optics, 2003, Volume : 42, Numéro : October 28
An instrument for step-height measurement by multiple-wavelength interferometry is described. The addition of a 1152-nm wavelength to a multiple-wavelength...
Article de périodique (revue)