https://publications-cnrc.canada.ca/fra/voir/objet/?id=cb2f666e-e529-4ec1-91b3-b0a0c3877302
ECS Transactions, 2009, Volume : 25, Numéro : 6
Hf distributions in as-grown and annealed (HfO2)0.25(SiO2)0.75 films with thicknesses in the range 4-13 nm were investigated by high resolution transmission...
Article de périodique (revue)